In recent years, the study of cosmic dust has been a very active field in cosmochemistry and astronomical geology in that it can provide valuable information about the origin and evolution of the solar system and Galaxy. Those spherules, however, are too small to be analyzed by the normal chemical analytical techniques. The aim of our work is to use INAA for determining the trace elements in the siliceous and vitreous spherules picked up from deep-sea sediments. The experimental results demonstrate that the spherules of different origins have different chemical compositions. In our work REE in siliceous and vitreous spherules were analyzed, and their REE patterns normalized to C1 chondrite were made. It can be seen through the work that the crustal samples have undergone chemical fractionation while some siliceous and vitreous spherules have obviously not, which favors their extraterrestrial origin.